Author:
Iizuka Satoru,Sato Noriyoshi
Subject
Electrical and Electronic Engineering,Energy Engineering and Power Technology
Reference24 articles.
1. Plasma processing
2. Etching technology for 015 ?m trough. 8th School on Plasma Electronics, Japan Society of Applied Physics 1997:57-75. (in Japanese)
3. Plasma production using a standing helicon wave
4. Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets
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9 articles.
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