Relationship between resist characteristics and matrix resin composition of chemically amplified three-component positive resist
-
Published:1997-01
Issue:1
Volume:80
Page:36-45
-
ISSN:8756-663X
-
Container-title:Electronics and Communications in Japan (Part II: Electronics)
-
language:en
-
Short-container-title:Electron. Comm. Jpn. Pt. II
Author:
Horibe Hideo,Kumada Teruhiko
Subject
Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy