Withdrawn: Analysis of thermal parameters and factors acting on thermal conduction of low-k films
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference11 articles.
1. Thermal conductivity measurement from 30 to 750 K: the 3ω method
2. Heat transport in thin dielectric films
3. Extending the 3ω-method to the MHz range for thermal conductivity measurements of diamond thin films
4. Thermal conductivity of ultra low-k dielectrics
5. Thermoreflectance technique to measure thermal effusivity distribution with high spatial resolution
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Thermal Conductivity Measurement of Low-k Dielectric Films: Effect of Porosity and Density;Journal of Electronic Materials;2013-12-27
2. Erratum: Analysis of thermal parameters and factors acting on thermal conduction of low-k films Shigeo Sato, Takao Okamura and Jiping Ye.Surface and Interface Analysis, 2008; 1362-1366;Surface and Interface Analysis;2009-03
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