Sensing layer combination of vertically aligned ZnO nanorods and graphene oxide for ultrahigh sensitivity IDE capacitive humidity sensor

Author:

Pongampai Satana1,Pengpad Puttapon2,Meananeatra Rattanawan2,Chaisriratanakul Woraphan2,Poyai Amporn3,Horprathum Mati3,Chananonnawathorn Chanunthorn3,Titiroongruang Wisut1,Muanghlua Rangson1

Affiliation:

1. Department of Electronics Engineering, Faculty of EngineeringKing Mongkut's Institute of Technology Ladkrabang Bangkok 10520 Thailand

2. Microelectronics research and development DepartmentThai Microelectronics Center Chachoengsao 24000 Thailand

3. National Electronics and Computer Technology CenterNational Science and Technology Development Agency Pathumthani 12120 Thailand

Funder

Thai Microelectronics center (TMEC) and Electronic Research Center, Faculty of Engineering, King Mongkut's Institute of Technology Ladkrabang

Publisher

Wiley

Subject

Electrical and Electronic Engineering

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