Development of electrostatic spherical aberration corrector using annular and circular electrodes-Reference-Cited by-同舟云学术

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Development of electrostatic spherical aberration corrector using annular and circular electrodes

Published:2016-08-24 Issue:11 Volume:48 Page:1160-1165
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Kawasaki Tadahiro¹²,Ishida Takafumi²,Takai Yasuyuki³,Ogawa Yuki³,Tomita Masahiro⁴,Matsutani Takaomi⁵,Kodama Tetsuji³,Ikuta Takashi⁶

Affiliation:

1. Nanostructures Research Laboratory; Japan Fine Ceramics Center; 2-4-1, Mutsuno, Atsuta-ku Nagoya 456-8587 Japan

2. Institute of Materials and Systems for Sustainability; Nagoya University; Furo-cho, Chikusa-ku Nagoya 464-8603 Japan

3. Graduate School of Science and Technology; Meijo University; 1-501, Shiogamaguchi, Tenpaku-ku Nagoya 468-8502 Japan

4. Vacuum Device Ltd.; 1285-5, Iijima-cho Mito 311-4155 Japan

5. Faculty of Science and Engineering; Kinki University; 3-4-1Higashiosaka Osaka 577-8502 Japan

6. Faculty of Engineering; Osaka Electro-Communication University; 18-8 Hatsu-cho Neyagawa 572-8530 Japan

Funder

Grant-in-Aid for Scientific Research from the Japan Society for the Promotion of Science

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference21 articles.

1. Historical aspects of aberration correction

2. Aberration correction past and present

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