1. S. Wolf R. N. Tauber Silicon Processing for the VLSI Ea Process Technology 1986
2. Interlevel dielectrics and passivating films;Schwartz,2001
3. Defects in Silicon: Processing
4. Silicon Nitride: Bulk Properties
5. Plasma deposited polycrystalline silicon nitride films;Sinha;Solid State Technol.,1980