Epitaxial Liftoff of Wafer‐Scale VO 2 Nanomembranes for Flexible, Ultrasensitive Tactile Sensors
Author:
Affiliation:
1. Key Lab of Semiconductor Materials ScienceInstitute of SemiconductorsChinese Academy of Sciences Beijing 100083 China
2. Center of Materials Science and Optoelectronics EngineeringUniversity of Chinese Academy of Sciences Beijing 100049 China
Funder
National Natural Science Foundation of China
Natural Science Foundation of Beijing Municipality
Publisher
Wiley
Subject
Industrial and Manufacturing Engineering,Mechanics of Materials,General Materials Science
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/admt.201800695
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