1. The Danish National Research Foundation and Villum Foundation's Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics (IDUN)Department of Health TechnologyTechnical University of Denmark Kongens Lyngby 2800 Denmark
2. DFM A/S (Danish Fundamental Metrology) Hørsholm 2970 Denmark
3. Department of Mechanical EngineeringTechnical University of Denmark Kongens Lyngby 2800 Denmark