Selective Oxidation and Carbonization by Laser Writing into Porous Silicon-Reference-Cited by-同舟云学术

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Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

Published:2018-10-21 Issue:1 Volume:4 Page:1800334
ISSN:2365-709X
Container-title:Advanced Materials Technologies
language:en
Short-container-title:Adv. Mater. Technol.

Author:

Keating Adrian¹^ORCID,Sun Xiao²

Affiliation:

1. Microelectronics Research Group Department of Mechanical Engineering Mail Bag M050 School of Engineering The University of Western Australia 35 Stirling Hwy 6009 Crawley Western Australia

2. Microelectronics Research Group Department of Electrical, Electronic and Computer Engineering School of Engineering The University of Western Australia 35 Stirling Hwy 6009 Crawley Western Australia

Funder

Australian Research Council

Australian National Fabrication Facility

Publisher

Wiley

Subject

Industrial and Manufacturing Engineering,Mechanics of Materials,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/admt.201800334

Reference35 articles.

1. Micropatterning of Porous Silicon Films by Direct Laser Writing

2. Topological Control of Porous Silicon Photonic Crystals by Microcontact Printing

3. Multilayer porous silicon diffraction gratings operating in the infrared

4. Direct Imprinting of Porous Substrates: A Rapid and Low-Cost Approach for Patterning Porous Nanomaterials

5. Porous silicon biosensors on the advance

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recent progress of laser processing technology in micro-LED display manufacturing: A review;Optics & Laser Technology;2025-02

2. Micromachining porous silicon thin films for thermal sensing applications;Applied Materials Today;2024-08

3. Design of energy meter for laser pulse energies Nd: YAG (1.06 µm) and SHG (532 nm) using PZT/SiO2 composites;AIP Conference Proceedings;2024

4. Morphological and Optical Transformation of Gas Assisted Direct Laser Written Porous Silicon Films;Small;2023-04-17

5. An investigation of aluminum nitride thin films patterned by femtosecond laser;Applied Physics Letters;2020-04-13

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