Identifying the mechanism of formation of chlorinated silane polymer by‐products during chemical vapor infiltration of SiC from CH 3 SiCl 3 /H 2-Reference-Cited by-同舟云学术

Identifying the mechanism of formation of chlorinated silane polymer by‐products during chemical vapor infiltration of SiC from CH ₃ SiCl ₃ /H ₂

Published:2022-01-13 Issue:5 Volume:54 Page:300-308
ISSN:0538-8066
Container-title:International Journal of Chemical Kinetics
language:en
Short-container-title:Int J of Chemical Kinetics

Author:

Sato Noboru¹^ORCID,Fukushima Yasuyuki²,Shima Kohei¹,Funato Yuichi¹,Momose Takeshi¹,Koshi Mitsuo³,Shimogaki Yukihiro¹

Affiliation:

1. Department of Materials Engineering The University of Tokyo Tokyo Japan

2. Advanced Applied Science Department Research Laboratory IHI Corporation Yokohama Japan

3. Center for Low Carbon Society Strategy Japan Science and Technology Agency Tokyo Japan

Publisher

Wiley

Subject

Inorganic Chemistry,Organic Chemistry,Physical and Theoretical Chemistry,Biochemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/kin.21559

Reference31 articles.

1. Design, preparation and properties of non-oxide CMCs for application in engines and nuclear reactors: an overview

2. SiC-Matrix Composites: Nonbrittle Ceramics for Thermo-Structural Application

3. Thermal and Environmental Barrier Coatings for SiC/SiC CMCs in Aircraft Engine Applications*

4. Investigative Report by the Accident Investigation Committee for the Explosion & Fire Accident occurred in the High‐Purity Polycrystalline Silicon Manufacturing Facility at Yokkaichi Plant of Mitsubishi Materials Corporation (in Japanese) Mitsubishi Materials Corporation June 12 2014 http://www.mmc.co.jp/corporate/en/news/2014/news20140612.html. Accessed January 11 2022.

5. CVD of SiC from Methyltrichlorosilane. Part II: Composition of the Gas Phase and the Deposit

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