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Stability of plasma‐enhanced atomic layer deposited barrier films in biological solutions

  • Published:2020-10-14 Issue:3 Volume:3 Page:
  • ISSN:2577-8196
  • Container-title:Engineering Reports
  • language:en
  • Short-container-title:Engineering Reports

Author:

Singh Ankit K.12ORCID,Adstedt Katarina1,Miao Tianxin3,Champion Julie3,Singh Preet M.1,Graham Samuel12

Affiliation:

1. School of Materials Science and Engineering Georgia Institute of Technology Atlanta Georgia USA

2. George W. Woodruff School of Mechanical Engineering Georgia Institute of Technology Atlanta Georgia USA

3. School of Chemical & Biomolecular Engineering Georgia Institute of Technology Atlanta Georgia USA

Funder

National Institute of Biomedical Imaging and Bioengineering

Publisher

Wiley

Reference50 articles.

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