Affiliation:
1. V Technology Co., Ltd. 134 Godo-cho Hodogaya-ku Yokohama Japan
Abstract
We have investigated de‐hydrogenation of amorphous film using CW blue light semiconductor laser annealing (BLDA). Dehydrogenation of hydrogen content as high as 20% can be implemented by using BLDA. This technology can be applied for large substrate beyond G8. We will report related experiment results in this paper.