Affiliation:
1. Micro‐ & Nanosystems Department of Mechanical & Process Engineering ETH Zurich Tannenstrasse 3 8092 Zurich Switzerland
2. ScopeM ETH Zurich Otto‐Stern‐Weg 3 8093 Zurich Switzerland
Abstract
Single‐layer chemical vapor deposition (CVD) graphene films are commonly transferred from their native growth substrates during characterization. However, the transfer process influences their intrinsic material properties and growth substrate‐related material information is lost. Herein, an in situ method is presented to suspend CVD graphene films directly on their growth substrate. The approach makes the sample compatible for characterization across the widely used optical and electron microscopy techniques such as Raman spectroscopy and transmission electron microscopy. In addition, a quality matrix framework “ISCOPEM2D V1.0” is provided to support the quantification, comparison, and validation of various material properties of single‐layer graphene. The approach provides a holistic overview of various properties and facilitates quality control and reproducibility of single‐layer graphene‐based application development. Similar approaches can be useful to develop quality matrix‐based for other 2D materials.
Funder
H2020 Marie Skłodowska-Curie Actions