1. Research Center for Materials, Architectures and Integration of Nanomembranes (MAIN) Chemnitz University of Technology 09126 Chemnitz Germany
2. Center for Microtechnologies Chemnitz University of Technology 09126 Chemnitz Germany
3. Fraunhofer Institute for Electronic Nano Systems ENAS 09126 Chemnitz Germany
4. Material Systems for Nanoelectronics Chemnitz University of Technology 09107 Chemnitz Germany
5. Nanophysics Faculty of Physics TU Dresden 01062 Dresden Germany