Affiliation:
1. IBM T.J. Watson Research Center Yorktown Heights NY 10598 USA
2. Macronix International Co., Ltd. Hsinchu 30078 Taiwan
Abstract
Herein, a low RESET current 1T1R mushroom‐cell phase‐change memory (PCM) device that uses fiber‐textured homostructure GeSbTe (GST) grown on highly oriented TiTe2 seed layer is reported. The homostructure device outperformed the industry standard device, that uses doped polycrystalline GST, on most figures of merit. The homostructure devices are also benchmarked against superlattice (SL) PCM devices with 10 periods of 5/5 nm GST/Sb2Te3 grown on the TiTe2 seed layer, and are found to have same low RESET current. It is also observed by transmission electron microscopy that the alternating layers of GST/Sb2Te3 and TiTe2/Sb2Te3 in SL devices are intermixed in the switched region after the devices are cycled with RESET/SET pulses. Additionally, when the SL device is left in the SET state, the intermixed switched region crystallinity is textured and exhibits van der Waals gaps. The SL PCM devices require a precise layered structure that is hard to yield on a full wafer scale. In contrast, fiber‐textured homostructure PCM cells reported here are easily manufacturable, while providing similarly low RESET current and low‐resistance drift, which makes this device suitable for analog artificial intelligence computation.
Reference15 articles.
1. Phase-Change Memory—Towards a Storage-Class Memory
2. N.Matsuzaki K.Kurotsuchi Y.Matsui O.Tonomura N.Yamamoto Y.Fujisaki N.Kitai R.Takemura K.Osada S.Hanzawa H.Moriya T.Iwasaki T.Kawahara N.Takaura M.Terao M.Matsuoka M.Moniwa inIEEE Int. Electron Devices Meeting IEDM Washington DC USA2005.
3. Interfacial phase-change memory
4. Phase-change heterostructure enables ultralow noise and drift for memory operation
5. Electro-Thermal Confinement Enables Improved Superlattice Phase Change Memory