Influences of the inclination of gratings on the alignment accuracies in moiré alignment systems

Author:

Furuhashi Hideo,Zhou Lizhong,Liu Jingnan,Matsuo Akihito,Uchida Yoshiyuki

Publisher

Wiley

Subject

Electrical and Electronic Engineering,Energy Engineering and Power Technology

Reference6 articles.

1. Photolithographic mask alignment using moiré technique;King;Appl Opt,1972

2. Automatic alignment system for optical projection printing;Bouwhuis;IEEE Trans Electron Devices,1979

3. A very high density alignment technique and precision thereof using moiré signals;Liu;Denki Gakkai Journal C,1996

4. Liu J Furuhashi H Torii A Hayashi N Yamada J Uchida Y Precision position control systems using moiré signals 968 972 1995

5. Double diffraction in the Fresnel region;Kodate;JJAP,1971

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