Elemental composition and thickness determination of thin films by electron probe microanalysis-Reference-Cited by-同舟云学术

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Elemental composition and thickness determination of thin films by electron probe microanalysis

Published:2022-12-20 Issue: Volume: Page:
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surface & Interface Analysis

Author:

Terborg Ralf¹,Kim Kyung Joong²^ORCID,Hodoroaba Vasile‐Dan³^ORCID

Affiliation:

1. Am Studio 2D Bruker Nano GmbH Berlin Germany

2. Division of Industrial Metrology Korea Research Institute of Standards and Science (KRISS) Daejeon Korea

3. Division 6.1 Surface Analysis and Interfacial Chemistry Federal Institute for Materials Research and Testing (BAM) Berlin Germany

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/sia.7183

Reference16 articles.

1. Composition and thickness of submicron metal coatings and multilayers on Si determined by EPMA

2. Measurement of Carbon Layer Thickness with EPMA and the Thin Film Analysis Software STRATAGem

3. Energy dispersive electron probe microanalysis (ED-EPMA) of elemental composition and thickness of Fe-Ni alloy films

4. Characterization of Pd-Ni-Co alloy thin films by ED-EPMA with application of the STRATAGEM software

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electron Energy-Loss Spectroscopy Method for Thin-Film Thickness Calculations with a Low Incident Energy Electron Beam;Technologies;2024-06-07

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