Synthesis and properties of ultralow dielectric porous polyimide films containing adamantane
Author:
Affiliation:
1. Polymer Composites Engineering Laboratory; Changchun Institute of Applied Chemistry, Chinese Academy of Sciences; Changchun 130022 People's Republic of China
2. University of Chinese Academy of Sciences; Beijing 100049 People's Republic of China
Funder
National Basic Research Program of China (973 Program)
Publisher
Wiley
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference46 articles.
1. Low dielectric constant materials for interlayer dielectric
2. Dielectric Films for Advanced Microelectronics
3. Polyimides and Other High-Temperature Polymers
4. Low dielectric constant materials for microelectronics
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