Efficiency of polyurethane polishers during the optical glass polishing-Reference-Cited by-同舟云学术

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Efficiency of polyurethane polishers during the optical glass polishing

Published:2012-02-28 Issue:1 Volume:37 Page:31-48
ISSN:0151-9107
Container-title:Annales de chimie Science des Matériaux
language:
Short-container-title:Ann. Chim. Sci. Mat.

Author:

Belkhir Nabil,Bouzid Djamel,Herold Volker

Publisher

International Information and Engineering Technology Association

Subject

Materials Chemistry

Reference23 articles.

1. Precision Manufacturing

2. Effects of Various Facility Factors on Chemical Mechanical Polishing Process Defects

3. Motor-Current-Based Real-Time End Point Detection of Shallow-Trench-Isolation Chemical Mechanical Polishing Process Using High-Selectivity Slurry

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Compression behavior of polyurethane polishers in optical polishing process;The International Journal of Advanced Manufacturing Technology;2016-01-28

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