Hotspot Detection with Machine Learning Based on Pixel-Based Feature Extraction

Abstract

The complexity of physical verification increases rapidly with fast shrinking technology nodes. Considering only design rule checking (DRC) constraints or lithography models cannot capture the side physical effects in the fabrication process well. Thus, it is desirable to consider a more general physical verification problem with various types of hotspots. In this paper, we apply machine learning which is based on pixel-based feature extraction to deal with the generalized hotspot detection problem. First, a two-dimensional discrete Fourier transformation-based pixel extraction method is proposed to alleviate the shifting effect and produce stable hotspot features. Then, a pattern-based layout scanning approach is developed to enhance the program efficiency while preserving good detection accuracy. Finally, we design two false alarm reduction strategies to effectively reduce the number of detected nonhotspots and further improve the accuracy of hotspot position. Experimental results based on the industrial benchmarks show that our algorithm outperforms three competitive works in terms of accuracy, false alarm rate, efficiency, and time.