CO Gas-Induced Resonance Frequency Shift of ZnO-Functionalized Microcantilever in Humid Air

Author:

Aprilia Lia123ORCID,Nuryadi Ratno1ORCID,Gustiono Dwi1,Nurmahmudi 4,Udhiarto Arief2,Hartanto Djoko2,Yuliarto Brian5ORCID,Hosoda Makoto3,Neo Yoichiro3,Mimura Hidenori3

Affiliation:

1. Center for Materials Technology, Agency for the Assessment and Application of Technology, Puspiptek Building No. 224, South Tangerang, Banten 15314, Indonesia

2. Department of Electrical Engineering, Faculty of Engineering, Universitas Indonesia, Depok 16424, Indonesia

3. Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka 432-8011, Japan

4. Center for Technology Strategy and Audit, Agency for the Assessment and Application of Technology, South Tangerang, Banten, Indonesia

5. Engineering Physics Department, Institut Teknologi Bandung, Bandung 40132, Indonesia

Abstract

Resonance frequency shift of a zinc oxide- (ZnO-) functionalized microcantilever as a response to carbon monoxide (CO) gas has been investigated. Here, ZnO microrods were grown on the microcantilever surface by a hydrothermal method. The measurement of resonance frequency of the microcantilever vibrations due to the gas was carried out in two conditions, that is, gas flow with and without air pumping into an experiment chamber. The results show that the resonance frequency of the ZnO-functionalized microcantilever decreases because of CO in air pumping condition, while it increases when CO is introduced without air pumping. Such change in the resonance frequency is influenced by water vapor condition, and a possible model based on water-CO combination was proposed.

Funder

Ministry of Research, Technology and Higher Education of the Republic of Indonesia

Publisher

Hindawi Limited

Subject

General Materials Science

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2. Surface Plasmon Resonance Sensor Based on Kretschmann Configuration for Dengue Virus Detection;2022 International Conference on Radar, Antenna, Microwave, Electronics, and Telecommunications (ICRAMET);2022-12-06

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5. Highly sensitive CO sensor based on Al-doped-ZnO nanorods-coated resonant microcantilevers;Japanese Journal of Applied Physics;2020-06-19

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