Fabrication of an Antireflective Nanodome Array with High Packing Density for Photovoltaic Applications

Abstract

This paper describes a nanofabrication method for an antireflective nanodome array with high packing density. The master for the close packed nanodome array was fabricated by industrially well-established photolithography and physical vapor deposition processes to realize uniform and defect-free nanostructure in large area. The nanodome array was formed on the surface of a glass plate by a nanoimprinting process using the replicated mold from the master with the aim of reducing the Fresnel reflection of the glass surface. The replication fidelity was verified using scanning electron microscopy and the nanodome structured glass substrate showed ~3% increase in optical transmittance.