Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing-Reference-Cited by-同舟云学术

Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing

Published:2009 Issue: Volume:2009 Page:1-11
ISSN:1687-725X
Container-title:Journal of Sensors
language:en
Short-container-title:Journal of Sensors

Author:

Mayeh M.¹²,Viegas J.¹²³⁴,Srinivasan P.⁵,Marques P.³⁴,Santos J. L.³⁴,Johnson E. G.¹²,Farahi F.¹²

Affiliation:

1. Department of Physics and Optical Science, University of North Carolina at Charlotte, Charlotte, NC 28223, USA

2. Center for Optoelectronics and Optical Communications, University of North Carolina at Charlotte, NC 28223, USA

3. INESC Porto, Rua do Campo Alegre 687, 4169-007 Porto, Portugal

4. Departamento de Física, Faculdade de Ciências da Universidade do Porto, 4169-007 Porto, Portugal

5. College of Optics and Photonics, University of Central Florida, Orlando, FL 32816, USA

Abstract

We present optical sensors based on slotted multimode interference waveguides. The sensor can be tuned to highest sensitivity in the refractive index ranges necessary to detect protein-based molecules or other water-soluble chemical or biological materials. The material of choice is low-loss silicon oxynitride (SiON) which is highly stable to the reactivity with biological agents and processing chemicals. Sensors made with this technology are suited to high volume manufacturing.

Publisher

Hindawi Limited

Subject

Electrical and Electronic Engineering,Instrumentation,Control and Systems Engineering

Link

http://downloads.hindawi.com/journals/js/2009/470175.pdf

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