Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films-Reference-Cited by-同舟云学术

Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films

Published:2017 Issue: Volume:2017 Page:1-7
ISSN:1687-725X
Container-title:Journal of Sensors
language:en
Short-container-title:Journal of Sensors

Author:

Liu Jeng-Cheng¹,Cheng Yuang-Tung¹,Ho Sheng-Yun²,Hung Hsien-Sen¹,Chang Shun-Hsyung³^ORCID

Affiliation:

1. Department of Electrical Engineering, National Taiwan Ocean University, No. 2, Peining Rd., Keelung 20224, Taiwan

2. Department of Electronic Engineering, Hwa-Hsia University of Technology, No. 111, Gongzhuan Rd., Zhonghe Dist., New Taipei City 23568, Taiwan

3. Department of Microelectronic Engineering, National Kaohsiung Marine University, No. 142, Haijhuan Rd., Kaohsiung 81143, Taiwan

Abstract

This paper presents a high-sensitivity hydrophone fabricated with a Microelectromechanical Systems (MEMS) process using epitaxial thin films grown on silicon wafers. The evaluated resonant frequency was calculated through finite-element analysis (FEA). The hydrophone was designed, fabricated, and characterized by different measurements performed in a water tank, by using a pulsed sound technique with a sensitivity of −190 dB ± 2 dB for frequencies in the range 50–500 Hz. These results indicate the high-performance miniaturized acoustic devices, which can impact a variety of technological applications.

Funder

National Science Council

Publisher

Hindawi Limited

Subject

Electrical and Electronic Engineering,Instrumentation,Control and Systems Engineering

Link

http://downloads.hindawi.com/journals/js/2017/7326919.pdf

Reference22 articles.

1. The microfabrication of capacitive ultrasonic transducers

2. Micromachined high frequency ferroelectric sonar transducers

3. A micro-machined hydrophone employing a piezoelectric body combined on the gate of a field-effect transistor

4. Primary calibration of hydrophones with extended frequency range 1 to 70 MHz using optical interferometry

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Probabilistic Framework Allocation on Underwater Vehicular Systems Using Hydrophone Sensor Networks;Water;2022-04-15

2. Design, fabrication and characterization of piezoelectric cantilever MEMS for underwater application;Micro and Nano Engineering;2020-06

3. Array MEMS Vector Hydrophone Oriented at Different Direction Angles;Sensors;2019-10-03

4. Joint Bearing and Range Estimation of Multiple Objects from Time-Frequency Analysis;Sensors;2018-01-19