Synthesis of Silicon Nanoparticles and Nanowires by a Nontransferred Arc Plasma System

Abstract

Silicon nanomaterials were synthesized from solid silicon powder in microsize using a nontransferred arc plasma system. Synthesized silicon nanomaterials were sphere or wire in morphology according to the input power of arc plasma, the flow rate of plasma forming gas, and the collecting position of product. The product was spherical nanoparticles at a high input power for complete evaporation, while it was nanowires at a relatively low input power. The mean diameter of synthesized silicon nanoparticles was increased from 20.52 nm to 40.01 nm by increasing the input power from 9 kW to 13 kW. On the other hand, the diameter of silicon nanowires was controllable by changing the flow rate of plasma forming gas. The mean diameter of silicon nanowires was increased from 16.69 nm to 23.03 nm by decreasing the plasma forming gas flow rate from 15 L/min to 12 L/min.