Mesoporous In2O3: Effect of Material Structure on the Gas Sensing

Author:

Cheng Z. X.1,Ren X. H.1,Xu J. Q.12,Pan Q. Y.1

Affiliation:

1. Department of Chemistry, College of Science, Shanghai University, Shanghai 200444, China

2. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

Abstract

We present a semiconductor gas sensor based on mesoporous In2O3(m-In2O3). The m-In2O3was successfully fabricated by a simple sol-gel process, using block copolymer PE6800 as a soft template. The results of gas sensing reveal that the m-In2O3prepared at room temperature shows higher resistance, which plays the key role in its greater sensitivity. The pore structure of material has an influence on gas adsorption on the material surface, which further affects response-recovery time of gas sensor.

Funder

National Natural Science Foundation of China

Publisher

Hindawi Limited

Subject

General Materials Science

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