1. School of Chemical Engineering, Hanoi University of Science and Technology, No. 1 Dai Co Viet Road, Hai Ba Trung District, Hanoi, Vietnam
2. Laboratory for MEMS/NEMS Technology, National Center for Technological Progress, 25 Le Thanh Tong Street, Hoan Kiem District, Hanoi, Vietnam
3. School of Biotechnology and Food Technology, Hanoi University of Science and Technology, No. 1 Dai Co Viet Road, Hai Ba Trung District, Hanoi, Vietnam
4. International Training Institute for Materials Science, Hanoi University of Science and Technology, No. 1 Dai Co Viet Road, Hai Ba Trung District, Hanoi, Vietnam