Bragg Grating Optical Filters by UV Nanoimprinting

Author:

Casalboni M.1,Dominici L.2,Foglietti V.3,Michelotti F.2,Orsini E.1,Palazzesi C.1,Stella F.1,Prosposito P.1

Affiliation:

1. Department of Physics, University of Rome—Tor Vergata and Istituto Nazionale Scienze e Tecnologie dei Material (INSTM), Via della Ricerca Scientifica, 1-00133 Rome, Italy

2. Department of Energetics, University of Rome—la Sapienza, and CNISM, Via A. Scarpa 16, 00161 Rome, Italy

3. CNR-IFN, Institute for Photonics and Nanotechnologies, Via Cineto Romano, 00156 Rome, Italy

Abstract

Results on an optical waveguide filter operating in the near IR region are reported. The device consists of a hybrid sol-gel -based grating loaded waveguide, obtained through the merging of conventional photolithography and UV-nanoimprinting. Starting from submicrometric gratings, fabricated by electron beam lithography, a soft mould has been produced and the original structures were replicated onto sol-gel photosensitive films. A final photolithographic step allowed the production of grating-loaded channel waveguides. The devices were optically characterized by transmission measurements in the telecom range 1450–1590 nm. The filter extinction ratio is −11 dB and the bandwidth is 1.7 nm.

Funder

Italian Ministry of University

Publisher

Hindawi Limited

Subject

General Materials Science

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