Affiliation:
1. Instituto de Microelectrónica de Barcelona (IMB-CNM), CSIC, Campus UAB, Bellaterra, 08193 Barcelona, Spain
Abstract
Tungsten oxide nanoneedles (NNs) are grown and integrated directly with polymeric transducing platforms for gas sensors via aerosol-assisted chemical vapor deposition (AACVD) method. Material analysis shows the feasibility to grow highly crystalline nanomaterials in the form of NNs with aspect ratios between 80 and 200 and with high concentration of oxygen vacancies at the surface, whereas gas testing demonstrates moderate sensing responses to hydrogen at concentrations between 10 ppm and 50 ppm, which are comparable with results for tungsten oxide NNs grown on silicon transducing platforms. This method is demonstrated to be an attractive route to fabricate next generation of gas sensors devices, provided with flexibility and functionality, with great potential in a cost effective production for large-scale applications.
Funder
Spanish Ministry for Science and Innovation
Subject
General Materials Science
Cited by
13 articles.
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