Graphite materials used in semiconductor manufacturing

Author:

Tao Rie1

Affiliation:

1. Merchandise Development Dept., Global R&D Division, Toyo Tanso Co., Ltd., Japan

Publisher

The Carbon Society of Japan

Subject

Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference24 articles.

1. 1) NEDOプロジェクト紹介,Focus NEDO 55 (2014) 12-13 [in Japanese].

2. 2) H. Matsunami, N. Ohtani, T. Kimoto and T. Nakamura, Technology of Semiconductor SiC and Its Application (2011) Nikkan Kogyo Shinbun-sha.

3. 3) A. Oya, Shin・Tansozairyo-Nyumon (The Carbon Society of Japan, ed.) (1996) pp. 105-116, REALIZE Science & Engineering.

4. 4) E. A. Heintz and F. Rodriguez-Reinso, Introduction to Carbon Technologies (H. Marsh, ed.) (1997) pp. 561-578, University of Alicante Secretariado de Publicaones, Raspeig.

5. 5) M. Inagaki and K. Feiyu, Carbon Materials Science and Engineering (2006) pp. 269-306, Tsinghua University Press, Beijing.

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