Virtual substrate model forin situthin film thickness determination
Author:
Publisher
Informa UK Limited
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://www.tandfonline.com/doi/pdf/10.1179/026708400322911564
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1. In situ determination of optical constants of growing hydrogenated amorphous silicon film by p‐polarized light reflectance measurement on the surface
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1. Research on Photoelectric-Precise Monitoring System of Thin-Film Deposition;Lecture Notes in Electrical Engineering;2012
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