Combinatorial synthesis of Cr1 − xAlxN and Ta1 − xAlxN coatings using industrial scale co-sputtering-Reference-Cited by-同舟云学术

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Combinatorial synthesis of Cr1 − xAlxN and Ta1 − xAlxN coatings using industrial scale co-sputtering

Published:2016-02-23 Issue:4 Volume:32 Page:252-257
ISSN:0267-0844
Container-title:Surface Engineering
language:en
Short-container-title:Surface Engineering

Author:

Schalk N.,Weirather T.,Sabitzer C.,Hirn S.,Terziyska V. L.,Gangopadhyay S.,Czettl C.,Polcik P.,Kathrein M.,Mitterer C.

Publisher

Maney Publishing

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://www.tandfonline.com/doi/pdf/10.1179/1743294415Y.0000000055

Reference20 articles.

1. Microhardness and lattice parameter of Cr1−xAlxN films

2. Structural, mechanical and tribological properties of CrAlN coatings deposited by reactive unbalanced magnetron sputtering

3. Investigation of the properties of Al1−xCrxN coatings prepared by cathodic arc evaporation

4. Effect of Deposition Conditions on the Structure and Properties of CrAlN Films Prepared by Pulsed DC Reactive Sputtering in FTS Mode at High Al Content

5. Tribological Properties of Arc-Evaporated NbAlN Hard Coatings

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Mechanical and Tribological Properties of Ta-N and Ta-Al-N Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering;Materials;2022-05-07

2. Structure, electrical, and optical properties of reactively sputter-deposited Ta—Al—N thin films;Journal of Applied Physics;2022-03-14

3. The effect of duty cycle on the mechanical and electrochemical corrosion properties of multilayer CrN/CrAlN coatings produced by cathodic arc evaporation;Surface Engineering;2020-06-15

4. Tribochemistry of TaN, TiAlN and TaAlN coatings under ambient atmosphere and high-vacuum sliding conditions;Applied Surface Science;2020-01

5. Silica-based antireflection coating by glancing angle deposition;Surface Engineering;2019-03-29

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