Prediction of radio frequency power effect on silicon nitride deposition using a genetic algorithm based neural network
Author:
Publisher
Informa UK Limited
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://www.tandfonline.com/doi/pdf/10.1179/174329406X84985
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1. Low-temperature silicon nitride for thin-film electronics on polyimide foil substrates
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3. Properties of nitrogen doped silicon films deposited by low-pressure chemical vapor deposition from silane and ammonia
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