Polymer derived ceramics in MEMS/NEMS – a review on production processes and application
Author:
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering,Ceramics and Composites
Link
http://www.tandfonline.com/doi/pdf/10.1179/174367609X422171
Reference32 articles.
1. F. Fang, K. Liu, T. Kurfess and G. Lim: ‘Tool-based micro machining and applications in MEMS’, in ‘MEMS/NEMS’, (ed. C. T. Leondes), 1st edn, 678–740; 2006.
2. Silicon-Based Polymer-Derived Ceramics: Synthesis Properties and Applications-A Review
3. Mechanical and Tribological Behavior of Polymer-Derived Ceramics Constituted from SiCxOyNz
4. Advanced coatings on the basis of Si(C)N precursors for protection of steel against oxidation
5. Oxidation Kinetics of an Amorphous Silicon Carbonitride Ceramic
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