Preparation of amorphous carbon nitride films from toluene and nitrogen by rf-PECVD
Author:
Publisher
Informa UK Limited
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
http://www.tandfonline.com/doi/pdf/10.1179/026708304225019696
Reference12 articles.
1. Prediction of New Low Compressibility Solids
2. Structural and electronic properties of highly photoconductive amorphous carbon nitride
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4. Electrical and optical properties of CNx(0⩽x⩽0.25) films deposited by reactive magnetron sputtering
5. Hardness measurements on thin IBAD CNx films — a comparative study
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