Replication of sub-micrometre features using microsystems technology-Reference-Cited by-同舟云学术

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Replication of sub-micrometre features using microsystems technology

Published:2005-06-01 Issue:5-6 Volume:34 Page:222-226
ISSN:1465-8011
Container-title:Plastics, Rubber and Composites
language:en
Short-container-title:Plastics, Rubber and Composites

Author:

Pirskanen J.,Immonen J.,Kalima V.,Pietarinen J.,Siitonen S.,Kuittinen M.,Mönkkönen K.,Pakkanen T.,Suvanto M.,Pääkkönen E. J.

Publisher

Informa UK Limited

Subject

Materials Chemistry,Polymers and Plastics,General Chemical Engineering,Ceramics and Composites

Link

https://www.tandfonline.com/doi/pdf/10.1179/174328905X64722

Reference5 articles.

1. Review on micro molding of thermoplastic polymers

2. Replication of sub-micron features using amorphous thermoplastics

3. Electron Resists for Microcircuit and Mask Production

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