Simulation for deposition of ZnO thin film layer by kinetic Monte Carlo method-Reference-Cited by-同舟云学术

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Simulation for deposition of ZnO thin film layer by kinetic Monte Carlo method

Published:2009-09 Issue:3 Volume:13 Page:135-138
ISSN:1432-8917
Container-title:Materials Research Innovations
language:en
Short-container-title:Materials Research Innovations

Author:

Dee C. F.¹,Lee J. D.²,Sow C. H.³,Majlis B. Y.⁴,Hamzah A.⁴,Abdullah H.⁵,Lee S.-K.⁶

Affiliation:

1. Institute of Microengineering and Nanoelectronics (IMEN) University Kebangsaan Malaysia, Bangi, Malaysia;, Email: deechangfu@gmail.com

2. Inter-University Semiconductor Research Center (ISRC), Seoul National University, Seoul, Korea

3. Department of Physics Faculty of Science, National University of Singapore, Singapore

4. Institute of Microengineering and Nanoelectronics (IMEN) University Kebangsaan Malaysia, Bangi, Malaysia

5. Department of Electric Electronic and Systems, Universiti Kebangsaan Malaysia, Bangi, Malaysia

6. Department of Semiconductor Science and Technology Chonbuk National University, Jeonbuk, Korea

Publisher

Informa UK Limited

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.tandfonline.com/doi/pdf/10.1179/143307509X437437

Reference21 articles.

1. DFT study for the anisotropic epitaxial growth of a-face ZnO(1120)

2. First-Principle Theoretical Study on Epitaxial Crystal Growth of GaN

3. Molecular dynamics simulations of solid-phase epitaxial growth in silicon

4. Molecular-dynamics simulation of Si1−xGex epitaxial growth on Si()

5. Multiscale diffusion Monte Carlo simulation of epitaxial growth

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1. Large-Scale Atomistic Simulation of the Structure of ZnO Films;Lobachevskii Journal of Mathematics;2023-08

2. Remaining useful life prediction for degrading systems with random shocks considering measurement uncertainty;Journal of Manufacturing Systems;2021-10

3. Modeling of Electrical Transport in YBCO Single Layer Thin Films using Flux Motion Model;Journal of Magnetics;2014-06-30

4. Kinetic-Dynamic Properties of Different Monomers and Two-Dimensional Homoepitaxy Growth on the Zn-Polar (0001) ZnO Surface;Crystal Growth & Design;2012-05-23

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