Influence Of Structure On The Dielectric Properties Of PECVD Polymer Films-Reference-Cited by-同舟云学术

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Influence Of Structure On The Dielectric Properties Of PECVD Polymer Films

Published:2006-09 Issue:3 Volume:10 Page:lxxxii-84
ISSN:1432-8917
Container-title:Materials Research Innovations
language:en
Short-container-title:Materials Research Innovations

Author:

Jiang Hao,Hong Lianggou,Venkatasubramanian N.,Iacek Kevin W,Grant J.T.,Eyink Kurt,Fries-Carr Sandra,Dang Thuy D.,Fleitz Paul,Bunning T.J.

Publisher

Informa UK Limited

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.tandfonline.com/doi/pdf/10.1179/mri.2006.10.3.lxxxii

Reference45 articles.

1. Yasuda H (1985) Plasma Polymerization, Academic Press, Inc. Orlando, Fl

2. d'Agostino R (ed) (1990) Plasma Deposition, Treatment, and Etching of Polymers; Academic Press, San Diego, CA

3. Biederman H, Osada Y (1992) Plasma Polymerization Processes; Elsevier: Amsterdam

4. Inagaki N (1996) Plasma Surface Modification and Plasma Polymerization; Technomic Publishing Co, Lancaster,PA

5. Plasma polymer films for 532 nm laser micromachining

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