Affiliation:
1. Université de Lyon, Institut des Nanotechnologies de Lyon (INL), UMR 5270 CNRS INSA ECL UCB CPE Bât. L. Brillouin,
43 Bd du 11 Nov. 1918, F69622 Villeurbanne, France
Abstract
Introduction:
Micro-Electrical Discharge Machining (μEDM) is a technique for noncontact
machining of conductive or semiconductor materials. It is mainly adapted to machining hard
materials. Its principle is based on the creation of electrical discharges between the micro tool and the
workpiece, which are immersed in a dielectric.
Methods:
Methods: It is a complementary process to mechanical or laser micromachining techniques or microelectronics (RIE, DRIE, LIGA). These methods can reach a resolution of 50 nm, but their main drawback is that they are mainly dedicated to silicon. The µEDM process depends on several physical, geometrical, and/or electrical parameters that need to be optimized in order to achieve a resolution lower than 5 µm in a reproducible way. The objective of this paper is to study the effect of the applied voltage VEE and the micro-tool diameter on the machining performances (removed volume, lateral gap, machining depth, and crater shape).
Result:
Result: The optimal parameters were used during drilling holes. An applied voltage of VEE = 50V was used as an optimal parameter.
Conclusion:
Concerning the diameter of the micro tool, we propose to use large diameter wires
(Φ=250μm; Φ=125μm) during the roughing phase for machining complex structures and small diameter
micro tools (Φ=80μm; Φ=40μm; Φ=20μm) during the finishing phase.
Publisher
Bentham Science Publishers Ltd.
Subject
Building and Construction
Reference15 articles.
1. Heckele M.; Schomburg W.K.; Review on micro molding of thermoplastic polymers. J Micromech Microeng 2004,14(3),R1-R14
2. Vaezi M.; Seitz H.; Yang S.; A review on 3d micro-additive manufacturing technologies. Int J Adv Manuf Technol 2013,67,1721-1754
3. Jahan M.; Rahman M.; Wong Y.S.; Micro- electrical discharge machining (microedm): Processes, varieties, and applications, comprehen-sive materials processing 2014
4. Receveur R.A.M.; Lindemans F.W.; Fde Rooij N.; Microsystem technologies for implantable applications. J Micromechanics Micro-engineering 2007,17,R50
5. Cusanelli G.; Minello M.; Torchia F.; Ammann W.; Grize P.E.; Properties of microholes for nozzle by micro-edm. 15th International Symposium on ElectroMachining (ISEM XV), 2007