Piezoelectric Vibration Energy Harvesters with Distinct Interdigital Electrodes Used for Toxic Gas Detection and in a Numerical Simulation for a Glucose Sensor Application

Abstract

Introduction: In this paper, a surface acoustic wave sensor (SAW) for dangerous gas sensing applications has been designed and experimented. The Glucose Sensor applications has been simulated to show that the piezoelectric material has a high significance for use in detection. Background: Detection of gases is one of the major applications SAW gas sensor extend its services into the field of medical and even in power plants. A Surface Acoustic Wave (SAW) is an acoustic wave that propagates on the surface of an elastic material (usually a solid), with an amplitude that decreases with the depth of the substrate. Objectives: SAW devices typically use electrodes on a piezoelectric material to convert an electrical signal to a SAW. Methods: This paper reviews the significance of piezoelectric materials and focuses on MEMS based SAW, and we investigate the resonance frequencies of a SAW gas sensor, which consists of an Inter Digitated Transducer (IDT) etched onto a piezoelectric substrate and covered with a thin Poly Isobutylene (PIB) film. Results: The mass of the PIB film increases as PIB selectivity adsorbs CH2Cl2 (Dichloromethane, DCM) in the air. This causes a shift in resonance to a slightly lower frequency. Conclutions: Our characterization of the piezoelectric material have shown a high significance when a sensitive layer of gas is etch for detected the dangerous gases, we used it in another application Glucose Sensor to show the importance of our system. The sensor of the Glucose Gensor application has been designed and simulated by a finite element analysis which was conducted on LiNbO3 pellets. This model is applied to verify the sensing properties of DCM and the glucose. On the other hand, the Glucose Sensor and the toxic gas detection allow measurement of the concentration,whether it is for the dangerous gases or glucose. The concentration of external glucose and the current density versus glucose concentration were measured by a finite element.