Design Compensation for Fabrication Imperfections of Tuning-Fork Gyroscopes-Reference-Cited by-同舟云学术

Design Compensation for Fabrication Imperfections of Tuning-Fork Gyroscopes

Published:2006-06-01 Issue:2 Volume:220 Page:97-103
ISSN:1464-4193
Container-title:Proceedings of the Institution of Mechanical Engineers, Part K: Journal of Multi-body Dynamics
language:en
Short-container-title:Proceedings of the Institution of Mechanical Engineers, Part K: Journal of Multi-body Dynamics

Author:

Poreddy S¹,Pai P F¹,Feng Z C¹

Affiliation:

1. Department of Mechanical and Aerospace Engineering, University of Missouri-Columbia, Columbia, MO, USA

Abstract

Microelectromechanical systems (MEMS) gyroscopes consist of proof masses that are driven to vibration. The sensing of angular motion requires certain symmetry in the driven motion. This symmetry is destroyed by imperfections introduced during the device fabrication. Strategies at the design stage that can compensate for the effect of fabrication imperfections are proposed. Our analyses are conducted through a discrete coupled oscillator model. The results are further verified through a finite element model of a tuning-fork microgyroscope design.

Publisher

SAGE Publications

Subject

Mechanical Engineering,Condensed Matter Physics

Link

http://journals.sagepub.com/doi/pdf/10.1243/14644193JMBD19

Reference9 articles.

1. Micromachined inertial sensors

2. Dual-axis microgyroscope with closed-loop detection

3. A new silicon rate gyroscope

4. High-resolution microgyroscope using vibratory motion adjustment technology

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