Dynamics and Trackability of Stylus Systems-Reference-Cited by-同舟云学术

Dynamics and Trackability of Stylus Systems

Published:1996-04 Issue:2 Volume:210 Page:159-165
ISSN:0954-4054
Container-title:Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
language:en
Short-container-title:Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

Author:

Whitehouse D J¹,Wang W L¹

Affiliation:

1. Centre for Nanotechnology and Microengineering, Department of Engineering, University of Warwick, Coventry

Abstract

Surface measuring instruments have been used for fifty years and their applications have been widespread. However, new demands are being made such as increased speed of measurement and also the capability of measuring more complex surfaces. This paper examines ways in which the design of the pick-up element can be optimized. It also deals in detail with the optimum parameters needed to measure a wide variety of random as well as periodic surfaces.

Publisher

SAGE Publications

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Link

http://journals.sagepub.com/doi/pdf/10.1243/PIME_PROC_1996_210_101_02

Reference10 articles.

1. Dynamic aspects of scanning surface instruments and microscopes

2. Morrison E. The development of a prototype high speed stylus profilometer and its application to rapid 3D surface measurement. Proceedings of Fourth Biannual Joint Warwick/Tokyo Nanotechnology Symposium, 1994.

3. Xu Y., Smith S. T. The determination of squeeze film damping in capacitance based cantilever force probes. Proceedings of Eighth Annual Meeting of the ASPE, 1993, p. 329.

4. Cross W. A. Gas film lubrication, 1962, p. 318 (John Wiley, New York).

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