Affiliation:
1. Centre for Microengineering and Metrology, University of Warwick, Coventry
Abstract
Surfaces have been measured for many years yet there are still many factors which have not been optimized both for the contacting methods and non-contacting methods. In this paper the philosophy of optimization for both types of system is examined and rules established for improvement of system fidelity. In particular, ways are suggested of increasing the speed of measurement. This new philosophy has implications when consideration is being given to improving the performance of the modern generation of surface measuring instruments. These include not only those measuring geometry such as the scanning tunnelling microscope but also devices for measuring force and friction.
Cited by
18 articles.
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