Author:
Dobrev T,Pham D T,Dimov S S
Abstract
The major drawbacks of long-pulse laser milling are the deposition of debris on the target surface and the formation of recast layers. The removal of debris becomes very important when laser milling is employed as a technology for microstructuring and especially for machining micro-cavities for a number of replication technologies. For such applications, the surface quality of the manufactured geometry becomes even more important due to the micro sizes of the machined features. A recast layer is also formed on the laser-milled surfaces. It generally consists of metal oxides and has different material properties from those of the bulk of the material. This paper discusses cleaning techniques for removing the debris, contaminations, and recast layers from micro-structures, and thus improving the surface quality of finished products. In particular, four techniques are investigated in this research: laser cleaning, ultrasonic cleaning, deoxidization (or pickling), and electrochemical polishing.
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献