Morphological effect of epitaxial Ag films with thickness of the order of nanometres on the tribological properties of a single-crystal silicon surface in an ultra-high-vacuum environment

Author:

Goto M1,Nakahara T2,Honda F3

Affiliation:

1. Hino Motors Ltd Tokyo, Japan

2. Tokyo Institute of Technology Tokyo, Japan

3. Toyota Technological Institute Nagoya, Japan

Abstract

The tribological properties of thin Ag films deposited on an Si (111) 7 × 7 surface have been studied in sliding contact with a diamond as a function of the film thickness ranging from 0.4 to 170nm in an ultra-high-vacuum environment. Observations by scanning tunnelling microscopy (STM) and atomic force microscopy on the morphology of the epitaxial Ag film showed three kinds of structure as the thickness increased: an island structure (at 1.5 nm or less), a network structure (between 1.5 and 20 nm) and a continuous rough film (thicker than 20 nm). The coefficient of friction reached at 0.007 for an Ag film thickness of 5 nm with the network structure, and it increased as the film thickness increased more than 5 nm. The coefficient of friction was 0.06 for a thickness of 170 nm; therefore, the coefficient of friction correlates with the morphology of the film. Observations by means of STM and reflection high-energy electron diffraction showed that the fine Ag (111) sheets with the network structure were sheared and rotated by sliding of the diamond surface. The high lubricity of the thin Ag film was attributed to a perfect film without shearing in spite of the nanometric thickness and much lower shear strength of the film than that of the Si substructure, and the lubricity was influenced by the morphology of the film.

Publisher

SAGE Publications

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering

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1. Preparations and tribological properties of soft-metal/DLC composite coatings by RF magnetron sputter using composite targets;International Journal of Mechanics and Materials in Design;2017-06-08

2. Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction;Tribology Online;2011

3. Nano-scale observation of frictional deformation at Ag single point contact with MEMS-in-TEM setup;Journal of Physics: Conference Series;2010-11-01

4. Tribological roles of nanometre thick Ag layers on Hertzian macroscopic contacts;Tribology - Materials, Surfaces & Interfaces;2008-12

5. Selective growth of epitaxial Ag film using tribo-assisted reorientation;Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology;2008-03-01

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