Coaxial twin-shaft magnetic fluid seals applied in vacuum wafer-handling robot
Author:
Publisher
Chinese Journal of Mechanical Engineering
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Link
http://www.springerlink.com/index/pdf/10.3901/CJME.2012.04.706
Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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