Modelling and Control Design of a V-Shaped Thermal Actuator System via Partial Derivative Equation Approach
Author:
Affiliation:
1. Hanoi University of Science & Technology, Hanoi, Vietnam and Thainguyen University of Technology, Thainguyen, Vietnam
2. Hanoi University of Science & Technology, Hanoi, Vietnam
Publisher
ACM Press
Reference28 articles.
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3. Changhong Guan and Yong Zhu; An Electrothermal microactuator with Z-shaped beams; Journal of micromechanics and microengineering; J. Micromech. Microeng. 20 (2010) 085014 (9pp).
4. Yong Zhu and Mehmet Rasit Yuce; Bidirectional Electrothermal Actuator With Z-Shaped Beams; IEEE SENSORS JOURNAL, VOL. 12, NO. 7, JULY 2012.
5. J. Varona, M. Tecpoyotl-Torres, A. A. Hamoui; Modeling of MEMS Thermal Actuation with External Heat Source; Fourth Congress of Electronics, Robotics and Automotive Mechanics, 2007.
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