Author:
Mitra Joydeep,Yu Peng,Pan David Z.
Cited by
4 articles.
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1. Exploring Vision Transformer model for detecting Lithography Hotspots;2022 International Conference on Disruptive Technologies for Multi-Disciplinary Research and Applications (CENTCON);2022-12-22
2. Lithography Hotspot Detection Based on Yolov5;2022 International Workshop on Advanced Patterning Solutions (IWAPS);2022-10-21
3. Machine Learning in Physical Verification, Mask Synthesis, and Physical Design;Machine Learning in VLSI Computer-Aided Design;2019
4. True process variation aware optical proximity correction with variational lithography modeling and model calibration;Journal of Micro/Nanolithography, MEMS, and MOEMS;2007-07-01