Autoencoder-Based Data Sampling for Machine Learning-Based Lithography Hotspot Detection-Reference-Cited by-同舟云学术

Autoencoder-Based Data Sampling for Machine Learning-Based Lithography Hotspot Detection

Published:2022-09-12 Issue: Volume: Page:
ISSN:
Container-title:Proceedings of the 2022 ACM/IEEE Workshop on Machine Learning for CAD
language:
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Author:

Ismail Mohamed Tarek¹,Sharara Hossam²,Madkour Kareem³,Seddik Karim²

Affiliation:

1. Siemens EDA & American University in Cairo, Cairo, Egypt

2. American University in Cairo, Cairo, Egypt

3. Siemens EDA, Cairo, Egypt

Publisher

ACM

Link

https://dl.acm.org/doi/pdf/10.1145/3551901.3556479

Reference19 articles.

1. Vadim Borisov and Jurgen Scheible . 2018. Lithography Hotspots Detection Using Deep Learning. In 2018 15th International Conference on Synthesis , Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) . IEEE , Prague , 145--148. https://doi.org/10.1109/SMACD. 2018 .8434561 Vadim Borisov and Jurgen Scheible. 2018. Lithography Hotspots Detection Using Deep Learning. In 2018 15th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD). IEEE, Prague, 145--148. https://doi.org/10.1109/SMACD.2018.8434561

2. Gangmin Cho , Yonghwi Kwon , Pervaiz Kareem , Sungho Kim , and Youngsoo Shin . 2021. Test pattern extraction for lithography modeling under design rule revisions . In Optical Microlithography XXXIV, Soichi Owa and Mark C. Phillips (Eds.). SPIE , Online Only , United States, 23. https://doi.org/10.1117/12.2583916 Gangmin Cho, Yonghwi Kwon, Pervaiz Kareem, Sungho Kim, and Youngsoo Shin. 2021. Test pattern extraction for lithography modeling under design rule revisions. In Optical Microlithography XXXIV, Soichi Owa and Mark C. Phillips (Eds.). SPIE, Online Only, United States, 23. https://doi.org/10.1117/12.2583916

3. Martin Ester , Hans-Peter Kriegel , Jörg Sander , and Xiaowei Xu. 1996. A density-based algorithm for discovering clusters in large spatial databases with noise . AAAI Press , 226--231. Martin Ester, Hans-Peter Kriegel, Jörg Sander, and Xiaowei Xu. 1996. A density-based algorithm for discovering clusters in large spatial databases with noise. AAAI Press, 226--231.

4. Tianyang Gai , Ying Chen , Pengzheng Gao , Xiaojing Su , Lisong Dong , Yajuan Su , Yayi Wei , and Tianchun Ye. 2019. Sample patterns extraction from layout automatically based on hierarchical cluster algorithm for lithography process optimization . In Design-Process-Technology Co-optimization for Manufacturability XIII, Jason P . Cain and Chi-Min Yuan (Eds.). SPIE , San Jose , United States, 32. https://doi.org/10.1117/12.2514177 Tianyang Gai, Ying Chen, Pengzheng Gao, Xiaojing Su, Lisong Dong, Yajuan Su, Yayi Wei, and Tianchun Ye. 2019. Sample patterns extraction from layout automatically based on hierarchical cluster algorithm for lithography process optimization. In Design-Process-Technology Co-optimization for Manufacturability XIII, Jason P. Cain and Chi-Min Yuan (Eds.). SPIE, San Jose, United States, 32. https://doi.org/10.1117/12.2514177

5. Jhih-Rong Gao , Bei Yu , and David Z . Pan . 2014 . Accurate lithography hotspot detection based on PCA-SVM classifier with hierarchical data clustering, John L. Sturtevant and Luigi Capodieci (Eds.). San Jose, California, USA , 90530E. https://doi.org/10.1117/12.2045888 Jhih-Rong Gao, Bei Yu, and David Z. Pan. 2014. Accurate lithography hotspot detection based on PCA-SVM classifier with hierarchical data clustering, John L. Sturtevant and Luigi Capodieci (Eds.). San Jose, California, USA, 90530E. https://doi.org/10.1117/12.2045888