Minimizing Cluster Number with Clip Shifting in Hotspot Pattern Classification
Author:
Affiliation:
1. Department of Electrical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan
Publisher
ACM
Link
https://dl.acm.org/doi/pdf/10.1145/3061639.3062283
Reference14 articles.
1. High performance lithographic hotspot detection using hierarchically refined machine learning;Ding D.;Proc. ASP-DAC,2011
2. Predicting variability in nanoscale lithography processes
3. Improved tangent space based distance metric for accurate lithographic hotspot classification
4. Hotspot detection on post-OPC layout using full-chip simulation-based verification tool: a case study with aerial image simulation
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